As microstructured glass becomes increasingly important for microsystems technology, the main application fields include micro-fluidic systems, micro-analysis systems, sensors, micro-actuators and implants. And, because glass has quite distinct properties from silicon, PMMA and metals, applications exist where only glass devices meet the requirements. The main advantages of glass derive from its amorphous nature, the precondition for its - theoretically - direction-independent geometric structurability. Microstructuring of Glasses deals with the amorphous state, various glass compositions and their properties, the interactions between glasses and the electromagnetic waves used to modify it. Also treated in detail are methods for influencing...
We present a novel process technology, which enables precision micro machining of glass wafers. With...
We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass b...
east rm 3 28 The drive towards miniaturization and high perfor-Thin-filmmetallic glasses, are mechan...
International audienceGlass is widely used as a structural and functional material in micro-total-an...
Micro structuring glass (MSG) technology is an exciting new technology, that has the potential for s...
Microfluidics has become recognized as a powerful platform technology with a wide range of applicati...
The ever-increasing demands for miniature integrated optics, mechanics, electronics, and biofluidics...
Current methods of microstructuring are review and compared: optical and x-ray lithography, etching ...
Due to their amorphous character and the concomitant lack of dislocations, metallic glasses exhibit ...
Generally, we are accustomed to consider glass an inert and durable material with high chemical stab...
Recent advances in the application of glassy materials in planar and fiber-based photonic structures...
[[abstract]]For many years, the development of effective laser machining techniques for making glass...
With the technology of the high-temperature micro-forming it is possible to mold functional structur...
This work aims for a macro- as well as microscopic control of electrical, chemical and (linear and n...
Manufacturing of micro optical components is approached with many different technologies. In this pa...
We present a novel process technology, which enables precision micro machining of glass wafers. With...
We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass b...
east rm 3 28 The drive towards miniaturization and high perfor-Thin-filmmetallic glasses, are mechan...
International audienceGlass is widely used as a structural and functional material in micro-total-an...
Micro structuring glass (MSG) technology is an exciting new technology, that has the potential for s...
Microfluidics has become recognized as a powerful platform technology with a wide range of applicati...
The ever-increasing demands for miniature integrated optics, mechanics, electronics, and biofluidics...
Current methods of microstructuring are review and compared: optical and x-ray lithography, etching ...
Due to their amorphous character and the concomitant lack of dislocations, metallic glasses exhibit ...
Generally, we are accustomed to consider glass an inert and durable material with high chemical stab...
Recent advances in the application of glassy materials in planar and fiber-based photonic structures...
[[abstract]]For many years, the development of effective laser machining techniques for making glass...
With the technology of the high-temperature micro-forming it is possible to mold functional structur...
This work aims for a macro- as well as microscopic control of electrical, chemical and (linear and n...
Manufacturing of micro optical components is approached with many different technologies. In this pa...
We present a novel process technology, which enables precision micro machining of glass wafers. With...
We report the fabrication of complex 3D microstructures in silica and polymethylmethacrylate glass b...
east rm 3 28 The drive towards miniaturization and high perfor-Thin-filmmetallic glasses, are mechan...