Stand und Perspektiven der Herstellung von Strukturen mit hohem Aspektverhaeltnis fuer Anwendungen in der Mikrosystemtechnik Kurzstudie

Current methods of microstructuring are review and compared: optical and x-ray lithography, etching methods, laser structuring by ablation or deposition, LIGA-Technique, lift-off technique and photo structuring of glasses. Technical features are described together with the used most important materials, achievable aspect ratios and structure depths. Technical and economical aspects of a potential application of these methods for the microsystem technique are discussed. (WEN)Available from TIB Hannover: RO 3532(12) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Forschung und Technologie (BMFT), Bonn (Germany)DEGerman