Deep microstructuring in glass for microfluidic applications

International audienceGlass is widely used as a structural and functional material in micro-total-analysis-systems (µTAS). Two low-cost techniques have been used to produce deep and vertical micro-structures into glass. A commercially available photosensitive glass (Foturan) is patterned by photolithography and etched in an HF solution for the construction of a microfluidic component. Channels and reservoirs were bonded to a PDMS cover. A two-level structure with various depths (reservoirs and channels) was also made by a double exposure through two different masks. The other technique uses Micro-Ultra-Sonic Machining (MUSM) to form channels by erosion into borosilicate glass (Pyrex 7740). The two structuring techniques are compared with respect to surface profiles and surface states