Add to ORKGMicro structuring glass (MSG) technology is an exciting new technology, that has the potential for solving demands in microelectronic and microfluidic applications including hermetic wafer level packaging. MSG offers the following advantages; chemical resistant borosilicate glass layers, layered structuring with photo resist and high glass deposition rates at low temperatures
This paper describes the main protocols that are used for fabricating microfluidic devices from glas...
MEMS mirrors are gaining considerable interest for consumer applications like embedded pico projecto...
International audienceA combination of material, patterning, and sealing method is introduced to rep...
As microstructured glass becomes increasingly important for microsystems technology, the main applic...
International audienceGlass is widely used as a structural and functional material in micro-total-an...
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive i...
Microfluidics has become recognized as a powerful platform technology with a wide range of applicati...
The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ra...
A new, versatile architecture is presented for microfluidic devices made entirely from glass, for us...
We present a novel process technology, which enables precision micro machining of glass wafers. With...
We report, for the first time, a MEMS fabrication process for building atomically smooth, symmetric ...
A new process technology is presented which allows the direct micro structuring of various glasses, ...
In the past decade wafer level packaging (WLP) has been proven to be a very competitive solution reg...
This chapter explores the micromachining of fluidic structures in silicon, and presents several exam...
The micro structuring of glass by hot forming processes is economically very interesting, particular...
This paper describes the main protocols that are used for fabricating microfluidic devices from glas...
MEMS mirrors are gaining considerable interest for consumer applications like embedded pico projecto...
International audienceA combination of material, patterning, and sealing method is introduced to rep...
As microstructured glass becomes increasingly important for microsystems technology, the main applic...
International audienceGlass is widely used as a structural and functional material in micro-total-an...
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive i...
Microfluidics has become recognized as a powerful platform technology with a wide range of applicati...
The past two decades have seen rapid advancement of Lab on a Chip (LOC) systems with applications ra...
A new, versatile architecture is presented for microfluidic devices made entirely from glass, for us...
We present a novel process technology, which enables precision micro machining of glass wafers. With...
We report, for the first time, a MEMS fabrication process for building atomically smooth, symmetric ...
A new process technology is presented which allows the direct micro structuring of various glasses, ...
In the past decade wafer level packaging (WLP) has been proven to be a very competitive solution reg...
This chapter explores the micromachining of fluidic structures in silicon, and presents several exam...
The micro structuring of glass by hot forming processes is economically very interesting, particular...
This paper describes the main protocols that are used for fabricating microfluidic devices from glas...
MEMS mirrors are gaining considerable interest for consumer applications like embedded pico projecto...
International audienceA combination of material, patterning, and sealing method is introduced to rep...