Signal Mixing Technique for Backscattered Electrons in the Scanning Electron Microscope

Signal mixing technique using asymetrically placed backscattered electron detectors in a scanning electron microscope is presented in this paper. Two types of detectors have been used: a low-take off angle ring scintillation detector (placed around the specimen) and a wide-angle semiconductor detector (placed above the specimen). It has been shown that the discussed configuration gives good real topography in all directions on the specimen surface and also reduces significantly the pseudo-topography effect of flat grain boundaries