Collection of Backscattered Electrons with a Single Polepiece Lens and a Multiple Detector

This paper is a part of a study on the use of a single-polepiece lens as an objective lens of an analytical scanning electron microscope (SEM). The single-polepiece lens has proved to be very suitable for the efficient collection of backscattered electrons (BSE) with a multielement semiconductor detector. For the BSE images in the sum and difference modes the contrast is a non-monotonic function of the excitation of the lens, due to the complicated nature of the BSE trajectories. The use of a six-element semiconductor detector provides a whole variety of BSE signal compositions in the conventional SEM as wel