Analysis of micronic phases containing light elements by quantitative backscattered electron microscopy and Image Analysis

A new microanalytical method for phases containing both heavy and very light elements has been developed. Its principle is the quantitative Image Analysis of Scanning Electron Microscopy images of backscattered electrons (BSE), coupled with X-Ray microanalysis. The BSE measurement over a large population of the same phase provides a very good precision on the result (± 0.1 atomic unit). This method requires a simple analytical configuration, and allows great ease of use by automation. The identification of a Al Lix Si phase by this method is presented