Mean Atomic Number Quantitative Assessment in Backscattered Electron Imaging
- Sanchez, Eloy Sebastian
- Torres Deluigi, María del Rosario
- Castellano, Gustavo Eugenio
DOIAbstract
A method for obtaining quantitative mean atomic number images in a scanning electron microscope for different kinds of samples has been developed. The backscattered electron signal is monotonically increasing with the mean atomic number Z, and accordingly Z can be given as a function of the image gray levels. From results obtained from Monte Carlo simulations, an exponential function is fitted to convert the backscattered registered gray levels into a Z image map. Once this fitting was performed, the reproducibility of the Z determination was checked through the acquisition of backscattered electron images from metal and mineral standards. The developed method can be applied to any unknown sample, always controlling the experimental conditi...
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