Add to ORKGLIGA technology capabilities at Sandia National Laboratories are able to manufacture very accurate high aspect ratio microstructures such as the LIGA Spring. LIGA is the acronym for the German words lithography (Lithographie), electrodeposition (Galvanoformung) and molding (Abformung) [1]. At Sandia, we primarily use “direct LIGA ” [2], where the mold produced by x-ray lithography is directly used to manufacture the final parts
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
This video, created by Support Center for Microsystems Education (SCME), provides an overview of th...
The LIGA microfabrication process can be used to produce high aspect ratio metal microstructures wit...
RevueInternational audienceThe by far leading technology for manufacturing MEMS devices is Si-microm...
The LIGA process uses deep X-ray lithography and electroforming to create high aspect ratio microstr...
Abstract-The LIGA technique which is being developed at the Research Center Karlsruhe offers the pos...
The steps of the LIGA process (deep-etch synchrotron X-ray radiation lithography, electroforming and...
The LIGA technique offers a means of manufacturing passive, refractive optical components such as le...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
LIGA fabricated materials and components exhibit several processing issues affecting their metallurg...
The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed...
This work deals with the development of an industry suited process aiming on the fabrication (based ...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
This video, created by Support Center for Microsystems Education (SCME), provides an overview of th...
The LIGA microfabrication process can be used to produce high aspect ratio metal microstructures wit...
RevueInternational audienceThe by far leading technology for manufacturing MEMS devices is Si-microm...
The LIGA process uses deep X-ray lithography and electroforming to create high aspect ratio microstr...
Abstract-The LIGA technique which is being developed at the Research Center Karlsruhe offers the pos...
The steps of the LIGA process (deep-etch synchrotron X-ray radiation lithography, electroforming and...
The LIGA technique offers a means of manufacturing passive, refractive optical components such as le...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
LIGA fabricated materials and components exhibit several processing issues affecting their metallurg...
The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed...
This work deals with the development of an industry suited process aiming on the fabrication (based ...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
This video, created by Support Center for Microsystems Education (SCME), provides an overview of th...