The LIGA process - micromachining techniques

The steps of the LIGA process (deep-etch synchrotron X-ray radiation lithography, electroforming and plasic molding) for mass fabrication of microstructures having high aspect ratio and great structural height are described. Based on the LIGA method, a large number of microstructures for various fields of application may be produced. However, it has been demonstrated until now on a laboratory scale only. Therefore, it has to be emphasized that further intensive work is necessary for successful commercial utilization of this new microfabrication method. For miniaturization of machines it is necessary to integrate the diversity of techniques. In this context, research and development in the LIGA process is urgently necessary