Add to ORKGThe LIGA microfabrication process can be used to produce high aspect ratio metal microstructures with nearly vertical sidewalls. LIGA is the German acronym for lithography (Lithographie), electrodeposition (Galvanoformung), and molding (Abformung) [1]. At Sandia National Laboratories, “direct LIGA ” [2] is used fo
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Micro-components have become increasingly important to meet the demand of miniaturization and have a...
Research work in 1993 was concentrated on the further development of microsystem techniques with spe...
LIGA technology capabilities at Sandia National Laboratories are able to manufacture very accurate h...
The LIGA process uses deep X-ray lithography and electroforming to create high aspect ratio microstr...
Abstract-The LIGA technique which is being developed at the Research Center Karlsruhe offers the pos...
RevueInternational audienceThe by far leading technology for manufacturing MEMS devices is Si-microm...
The steps of the LIGA process (deep-etch synchrotron X-ray radiation lithography, electroforming and...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed...
Electrochemical deposition is capable of producing high strength Ni- based alloys for micrometer to ...
The LIGA technique offers a means of manufacturing passive, refractive optical components such as le...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Micro-components have become increasingly important to meet the demand of miniaturization and have a...
Research work in 1993 was concentrated on the further development of microsystem techniques with spe...
LIGA technology capabilities at Sandia National Laboratories are able to manufacture very accurate h...
The LIGA process uses deep X-ray lithography and electroforming to create high aspect ratio microstr...
Abstract-The LIGA technique which is being developed at the Research Center Karlsruhe offers the pos...
RevueInternational audienceThe by far leading technology for manufacturing MEMS devices is Si-microm...
The steps of the LIGA process (deep-etch synchrotron X-ray radiation lithography, electroforming and...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The LIGA technique (German acronym for lithographie, galvanoformung, abformung) is a powerful tool f...
The report presented below is to appear in ''Electrochemistry at the Nanoscale'', Patrik Schmuki, Ed...
Electrochemical deposition is capable of producing high strength Ni- based alloys for micrometer to ...
The LIGA technique offers a means of manufacturing passive, refractive optical components such as le...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Most of the presently known microstructures are still fabricated using silicon-based technologies. H...
Micro-components have become increasingly important to meet the demand of miniaturization and have a...
Research work in 1993 was concentrated on the further development of microsystem techniques with spe...