Grundlagen und Anwendungsmoeglichkeiten der LIGA-Technik in der Mikrooptik

The LIGA technique offers a means of manufacturing passive, refractive optical components such as lenses or prisms having characteristic dimensions in the submillimeter range. It further allows components of any two-dimensional geometry, structural heights of several hundred micrometers and with vertical sidewalls to be manufactured with ultra-high precision. Besides, manufacture of side walls inclined towards the substrate surface opens up a way of deflecting the light imaged in the LIGA plane in a direction normal to the plane, e.g. by total internal reflection at a sidewall inclined by 45"0. In this way, a three-dimensional optical setup can be assembled and decoupling of light into electrooptical elements is achieved in an easy way. Besides the accuracy of patterning and the relative capability of positioning of several components on one substrate, the quality of the optical interfaces, in the case considered here of the sidewalls produced, will be crucial as regards the applications of LIGA structures in microoptics. The analysis of the surface roughness of the sidewalls made with an Linnick-type interferometer has made evident that the mean surface roughness of both the vertical and the inclined sidewalls is in the range of 30 nm to 50 nm. This good quality meets the prerequisite of applications of these components in many microoptical setups. The measurements of the imaging characteristics of individual components provides evidence of the good performance of the elements. A fiber coupling element is studied as a concrete example of application of microoptical LIGA components. (orig./SR)Dissertation submitted by J. GoetterSIGLEAvailable from TIB Hannover: ZA 5141(5153) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman