A 3x1 integrated pyroelectric sensor based on VDF/TrFE copolymer

This paper presents an integrated pyroelectric sensor based on a vinylidene fluoride¿trifluoroethylene (VDF/TrFE) copolymer. A silicon substrate that contains field-effect transistor (FET) readout electronics is coated with the VDF/TrFE copolymer film using a spin-coating technique. On-chip poling of the copolymer has been applied using a step-wise poling at room temperature. The copolymer deposition and polarization are compatible with semiconductor technology. An array of 3 × 1 integrated pyroelectric sensor has been realized. The current and voltage sensitivities and noise of this sensor have been measured. Voltage noise decreases with increasing frequency, and it is at 100 kHz