DESIGN OF A VDFflrFE COPOLYMER-ON-SILICON PYROELECTRIC SENSOR

This paper presents a design of a 'VDF/TrFE copolymer-on-silicon pyroelectric sensor. For an optimal design of a VDFSTrFE-on-silicon pyroelectric sensor, the one-dimensional diffusion equation is solved for the pyroelectric multilayer structure. The output current of the sensor is calculated. Improvement. of the sensor can be obtained by: (a) etching the silicon substrate under the sensor element, and (b) an additional VDF/TrFE copolymer layer as thermal isolation. Different noise sources for a pyroelectric sensor have been calculated. The dielectric noise dominates the noise sources. This conclusion has been verified by measured values. 1