Integrated ferroelectric polymer pyroelectric sensors : A comparative study of PVDF and its copolymer VDF/TrFE film

This paper presents a comparative study of integrated pyroelectric sensors based on ferroelectric polymers using different deposition techniques. A 9 µm PVDF film is bonded on a silicon substrate using a capacitive (UV curing acrylic) thin film and a 1 µm VDF/TrFE copolymer is coated directly using a spin-coating technique. The theoretical response of both PVDF and VDF/TrFE pyroelectric sensors are calculated and related to the measured values. Responsivities of 4.3 V/W and 1.2 V/W, at 400 Hz, have been achieved for the pyroelectric sensor based on PVDF and VDF/TrFE copolymer respectively. 1/f noise of the MOSFET is the dominant noise source for both sensors, resulting in an input referred noise voltage of 70 nV/Hz0.5 at 400 Hz