Add to ORKGA conceptual lattice design for a very compact superron-ducting synchrotron dedicated to x-ray lithography is presented. The synchrotron radiation produced in the high field supercon-ducting magnets has a critical wavelength of IOA at a beam energy of about 787 MeV. The size and angular divergence of the beam in this lattice can satisfy the future requirements for x-ray lithography: (T,, ~ 5 lmm, and uk y 5 Imr. The paper will present an optimization of the lithogriphy parameters o,, and al, for this lattice configuration
Soft x-ray radiation is affected neither by scattering in the resist nor by reflection from the subs...
This paper describes the design of a compact electron synchrotron light source for producing X-rays ...
The need for deep sub-micron resolution has driven the development of various 'next generation' lith...
High intensity, high energy X-rays for use in protein crystallography, nano-machining and medical ap...
DttRP.4:o develop a compact ekczon storage ring to be used as a X-Ray source for producing high dens...
This paper reviews the current state of X-ray lithography (XRL) with special emphasis on the exposur...
The beamline for microscopic x-ray magnetic circular dichroism (XMCD) and x-ray magnetic linear dich...
Compact light sources are being proposed for protein crystallography, medical imaging, nano-machinin...
X-ray lithography with wavelengths between 0.2 and 2 nm provides a structural resolution as good as ...
A superconducting compact synchrotron light source, the NIJI-III has been completed. The development...
proposed to be built as a spallation neutron source at Centre for Advanced Technology. A lattice wit...
Synchrotmn radiation from dipole magnets in electron storage rings has emerged as a useful source of...
In this paper I present a simple lattice suitable for a Superconducting Super Collider (super-super)...
Synchrotron radiation (SR) with relatively hard spectrum (up to 50 keV) is necessary for realization...
The design of a beam line for synchrotron radiation research is described. The 700 to 7000 eV energy...
Soft x-ray radiation is affected neither by scattering in the resist nor by reflection from the subs...
This paper describes the design of a compact electron synchrotron light source for producing X-rays ...
The need for deep sub-micron resolution has driven the development of various 'next generation' lith...
High intensity, high energy X-rays for use in protein crystallography, nano-machining and medical ap...
DttRP.4:o develop a compact ekczon storage ring to be used as a X-Ray source for producing high dens...
This paper reviews the current state of X-ray lithography (XRL) with special emphasis on the exposur...
The beamline for microscopic x-ray magnetic circular dichroism (XMCD) and x-ray magnetic linear dich...
Compact light sources are being proposed for protein crystallography, medical imaging, nano-machinin...
X-ray lithography with wavelengths between 0.2 and 2 nm provides a structural resolution as good as ...
A superconducting compact synchrotron light source, the NIJI-III has been completed. The development...
proposed to be built as a spallation neutron source at Centre for Advanced Technology. A lattice wit...
Synchrotmn radiation from dipole magnets in electron storage rings has emerged as a useful source of...
In this paper I present a simple lattice suitable for a Superconducting Super Collider (super-super)...
Synchrotron radiation (SR) with relatively hard spectrum (up to 50 keV) is necessary for realization...
The design of a beam line for synchrotron radiation research is described. The 700 to 7000 eV energy...
Soft x-ray radiation is affected neither by scattering in the resist nor by reflection from the subs...
This paper describes the design of a compact electron synchrotron light source for producing X-rays ...
The need for deep sub-micron resolution has driven the development of various 'next generation' lith...