THE BROOKHAVEN SUPERCONDUCTING X-RAY LITHOGRAPHY SOURCE (SXLS)

Synchrotmn radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithog-raphy’. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B, = 3.87 Tesla and a bending radius of p = 6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithogra-phy. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and a status report are presented