Superconducting Magnet Program for X-Ray Lithography Source at Brookhaven National Laboratory*

DttRP.4:o develop a compact ekczon storage ring to be used as a X-Ray source for producing high density computer chips. The circumference of this machine is 8.5 meters, the machine lattice consists of four quadrupoles, two sexrupoles and a pair of air-core combined function 3.87 T&a superconducting dipoles. BNL is developing the superconducting dipoles in collaboration with its industrial partners GDSSD and GSED. This paper will describe the field characteristics and engineer-ing realization of these magaets and present the current status of the program. I. INTR0Dum0N Synchrotron based X-Ray Lithography is recognized as a promising method to pmduce large quantity of sub-a&ma size computer chips at an affordable cost. Brookhaven National Lbxatoty was funded in 1988 to develop a compac