Performance of the Phase I Superconducting X-Ray Lithography Source (SXLS) at BNL*

The Phase I SXIS electron storage ring has a cir-cumference of 8.5 meters, it uses conventional dipole magnets, B I 1.1 T and p = 60 cm, and it is capable of operating in the range of 50-250 MeV. ’ It is the forerunner of the Phase II SXLS ring which will operate at 700 MeV and will make use of superconducting dipoles, B, = 3.87 Tesla, as a source of h, = 10 angstrom x-rays for proximity printing lithography. The Phase I storage ring has been successfully commis-sioned, stored currents in excess of one ampere have been achieved. A report on the performance of the machine is presented. 1. Operational Status Using the NSLS 80 MeV linac & booster ring as the injector, any pattern of 1-6 bunches can be filled in the SXLS ring with energies in the range of 80-200 MeV. Table 1 displays the present operational status of the machine; E is the injection energy, I,, is the stored current that is routinely achieved, LX is the maximum current achieved and Na is the number of symmetric bunches. The maximum stored current of the machine is limited primarily by the the injector performance and secondarily by instabilities. Roughly 85 % of the study time has been dedicated to 200 MeV operation as both the storage ring & the injector perform their best