Add to ORKGISBN 978-82-7860-224-9 http://www.mme2011.org/proceedings.htmInternational audienceIn this paper, we present the design and manufacturing of frequency compensated Micro-Electro-Mechanical (MEM) resonators, which fulfilled industry requirements combining high accuracy and collective correction. Both clamped-clamped beam and bulk mode resonators with holes compensation are treated. First electrical measurements of holed beam resonators are discussed
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrate...
The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (...
The very significant growth of the wireless communication industry has spawned tremendous interest i...
ISBN 978-82-7860-224-9 http://www.mme2011.org/proceedings.htmInternational audienceIn this paper, we...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
AbstractAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillator...
Abstract—Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to surmount the limi...
In response to a perturbation, the stiffness or mass of a MEMS resonator can change and previous res...
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrate...
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrate...
The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (...
The very significant growth of the wireless communication industry has spawned tremendous interest i...
ISBN 978-82-7860-224-9 http://www.mme2011.org/proceedings.htmInternational audienceIn this paper, we...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceThis paper deals with a new compensation method to insure Micro-Electro-Mechan...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Sili...
AbstractAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillator...
Abstract—Integrated CMOS-MEMS free-free beam resonators using pull-in mechanism to surmount the limi...
In response to a perturbation, the stiffness or mass of a MEMS resonator can change and previous res...
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrate...
To date, there have been interests in designing the Micro-Electro-Mechanical System (MEMS) integrate...
The mode-localization effect exhibited in electrostatically-coupled microelectromechanical systems (...
The very significant growth of the wireless communication industry has spawned tremendous interest i...