Holed MEM Resonators for High Accuracy Frequency Trimming

International audienceAfter consistently progress in Micro-Electro-Mechanical (MEM) resonators, Silicon oscillators are finally being commercialized for time and frequency control applications not requiring huge frequency accuracy. Indeed, they offer size reduction, potentially low cost and CMOS integration. However, frequency shift because of manufacturing mismatch is still one of the challenges to address high frequency accuracy applications. We propose a new frequency compensation method consisting in filling compensation holes smartly localized onto microresonator