Single-Pulse And Burst-Mode Ablation Of Gold Films Measured By Quartz Crystal Microbalance

Femtosecond ablation has several distinct advantages: the threshold energy fluence for the onset of damage and ablation is orders of magnitude less than for traditional nanosecond laser machining, and by virtue of the rapid material removal of approximately an optical penetration depth per pulse, femtosecond machined cuts can be cleaner and more precise than those made with traditional nanosecond or longer pulse lasers. However, in many materials of interest, especially metals, this limits ablation rates to 10-100 nm/pulse. We present the results of using multiple pulse bursts to significantly increase the per-burst ablation rate compared to a single pulse with the same integrated energy, while keeping the peak intensity of each individual pulse below the air ionization limit. Femtosecond ablation with pulses centered at 800-nm having integrated energy of up to 30 mJ per pulse incident upon thin gold films was measured via resonance frequency shifts in a gold-electrode-coated quartz-crystal oscillator. Measurements were performed using Michelson-interferometer-based burst generators, with up to 2 ns pulse separations, as well as pulse shaping by programmable acousto-optic dispersive filter (Dazzler from FastLite) with up to 2 ps pulse separations