Ionization detector of secondary electrons for environmental scanning electron microscope

This thesis deals with problematics of a detection of secondary electrons by ionization detector for environmental scanning electron microscope. In this thesis is described the difference between scanning electron microscope and environmental scanning electron microscope. Further there is described emission and detection of the choosen signals that arise while primary electrons are interacting with a specimen in scanning electron microscope. A special emphasis is placed on a description, sorting and on the form of detection of secondary electrons. In thesis there is described principle of a function of ionization a scintilation detectors. Experimental part of thesis describes design of 3 different elctrode systems of a tabular ionization detector, which will be intended to be placed in environmental scanning electron microscope. Based on measuring with the detectors, with experimental design, there is chosen one with the highest quality of signal detection