Scintillation SE Detector for VP SEM

This work contains description of basic properties and principles of electron microscopy focused on scanning electron microscopy. It describes construction solutions of a microscope, interaction between electron beam and sample, generation of backscattered and secondary electrons. Next chapters are dealing with development of electron microscopy and environmental scanning electron microscopy. The experimental part of this thesis is focuses on the detection of secondary electrons with scintillation detector in environmental scanning electron microscope at higher pressure in the specimen chamber. Concretely is focused on optimization of collecting grid voltage and measurement of pressure dependences