Scintillation SE detector fo environmental scanning electron microscope

This work contains theory about scanning electron microscopy. It describes construction, principle of operation and sinals generated by interactions between primary electron beam and specimen. Furthermore, it describes the most common method for detection of secondary electrons using scintillation detector. Next chapters are dealing with last development stage of scanning electron microscopy, which is environmental scanning electron microscopy. Experimental part is evaluating dependency of size of detected signal with scintillation detector on pressure of water vapor in specimen chamber. It also considers appropriate size of voltages enclosed on electrodes of the scintillation detector to optimize detection