Add to ORKGpeer reviewedWe report in this work the fabrication and optical characterization of micromirrors with inversed pyramidal shape (pits). The pyramids are etched on silicon using an anisotropic etchant and then gold coated to form a mirror
Potassium hydroxide (KOR) etching was used to create four sided pyramids for potential use in vacuum...
An optical microscopy study is presented of the micromorphology of silicon surfaces etched in KOH an...
A periodically ordered, truncated pyramid array of a single-crystal silicon was readily fabricated b...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
In creating mirrored silicon structures for micro-optics, the smoothness of the surface and etch rat...
Microelectromechanical System (MEMS) are systems of micron-sized structures and typically integrated...
This paper describes a technique for fabricating three-dimensional, metallic, pyramidal microstructu...
We have fabricated curved optical micromirrors on silicon. We expect to be able to form open optical...
AbstractThe possibility of fabrication of micromirrors inclined towards silicon substrate at 45̊ is ...
A simple and low-cost method using the combination of metal-assisted chemical etching (MacEtch) and ...
In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si) surfac...
Abstract. The texturization of monocrystalline silicon wafers using a mixture of potassium hydroxide...
Potassium hydroxide (KOR) etching was used to create four sided pyramids for potential use in vacuum...
An optical microscopy study is presented of the micromorphology of silicon surfaces etched in KOH an...
A periodically ordered, truncated pyramid array of a single-crystal silicon was readily fabricated b...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
In creating mirrored silicon structures for micro-optics, the smoothness of the surface and etch rat...
Microelectromechanical System (MEMS) are systems of micron-sized structures and typically integrated...
This paper describes a technique for fabricating three-dimensional, metallic, pyramidal microstructu...
We have fabricated curved optical micromirrors on silicon. We expect to be able to form open optical...
AbstractThe possibility of fabrication of micromirrors inclined towards silicon substrate at 45̊ is ...
A simple and low-cost method using the combination of metal-assisted chemical etching (MacEtch) and ...
In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si) surfac...
Abstract. The texturization of monocrystalline silicon wafers using a mixture of potassium hydroxide...
Potassium hydroxide (KOR) etching was used to create four sided pyramids for potential use in vacuum...
An optical microscopy study is presented of the micromorphology of silicon surfaces etched in KOH an...
A periodically ordered, truncated pyramid array of a single-crystal silicon was readily fabricated b...