Add to ORKGGold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems
We have fabricated and characterized a Fully Programmable Micro-Diffraction Grating (FPMDG) with 64 ...
AbstractThe possibility of fabrication of micromirrors inclined towards silicon substrate at 45̊ is ...
A combination of silicon anisotropic etch and mechanical hot embossing techniques is used to demons...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
peer reviewedWe report in this work the fabrication and optical characterization of micromirrors wit...
We have fabricated curved optical micromirrors on silicon. We expect to be able to form open optical...
In creating mirrored silicon structures for micro-optics, the smoothness of the surface and etch rat...
This paper reports on a process to create microlenses characterized by unconventional footprints, sp...
Based on silicon micromachining technology, a novel deformable mirror with 30 mm ?? 30 mm effective ...
In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process ...
In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si) surfac...
[[abstract]]In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconduct...
Micromirror is a Micro-Electro-Mechanical Systems (MEMS) device used to steer light by tilting or di...
We have fabricated and characterized a Fully Programmable Micro-Diffraction Grating (FPMDG) with 64 ...
AbstractThe possibility of fabrication of micromirrors inclined towards silicon substrate at 45̊ is ...
A combination of silicon anisotropic etch and mechanical hot embossing techniques is used to demons...
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structu...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
Concave pyramids are created in the (100) surface of a silicon wafer by anisotropic etching in potas...
peer reviewedWe report in this work the fabrication and optical characterization of micromirrors wit...
We have fabricated curved optical micromirrors on silicon. We expect to be able to form open optical...
In creating mirrored silicon structures for micro-optics, the smoothness of the surface and etch rat...
This paper reports on a process to create microlenses characterized by unconventional footprints, sp...
Based on silicon micromachining technology, a novel deformable mirror with 30 mm ?? 30 mm effective ...
In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconductor) process ...
In this paper, inverted pyramidal microstructures are designed and fabricated on silicon (Si) surfac...
[[abstract]]In this study we used the commercial 0.35 µm CMOS (complementary metal oxide semiconduct...
Micromirror is a Micro-Electro-Mechanical Systems (MEMS) device used to steer light by tilting or di...
We have fabricated and characterized a Fully Programmable Micro-Diffraction Grating (FPMDG) with 64 ...
AbstractThe possibility of fabrication of micromirrors inclined towards silicon substrate at 45̊ is ...
A combination of silicon anisotropic etch and mechanical hot embossing techniques is used to demons...