Add to ORKGSubmicron minimum feature sizes are required for integrated optical and microoptical components. Electron beam lithography has been used for the fabrication of three-dimensional patterns with solution rate control in order to realize wave guides, couplers, gratings and microlenses. Especially the following results have to be emphasized: 1. computer generated holograms with large pixel number (to 10"9) 2. microlenses and -arrays of different shape and surface area 3. lateral ARROWs, on which the function of this new waveguide principle was proved, first in the international frameSIGLEAvailable from TIB Hannover: F93B1272+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekBundesministerium fuer Forschun...
Beam shaping—the ability to engineer the phase and the amplitude of massive and massless particles—h...
Recent research revealed that using the effective medium approach to generate arbitrary multi-phase ...
This thesis describes several techniques for the optimization of the manufacturing of relief diffrac...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
Beam shaping - the ability to engineer the phase and the amplitude of massive and massless particles...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
Thin film integrated optics components such as light guides, modulators, directional couplers, and p...
The invention relates to novel three-dimensional waveguide structures and a process for the producti...
The fabrication of three-dimensional microstructure elements by electron-beam lithography and dry et...
Since the beginning of micro-optics fabrication most of the used technologies have been adapted from...
This thesis treats design, manufacture, evaluation and applications of computer-generated surface re...
We have developed different approaches for optical beam deflection on the base of transmittive micro...
This thesis treats design, manufacture, evaluation and applications of computer-generated surface re...
Beam shaping - the ability to engineer the phase and the amplitude of massive and massless particles...
Beam shaping—the ability to engineer the phase and the amplitude of massive and massless particles—h...
Recent research revealed that using the effective medium approach to generate arbitrary multi-phase ...
This thesis describes several techniques for the optimization of the manufacturing of relief diffrac...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
Beam shaping - the ability to engineer the phase and the amplitude of massive and massless particles...
The broad development of the micro- and nano-technologies in the past few years increased the need o...
Thin film integrated optics components such as light guides, modulators, directional couplers, and p...
The invention relates to novel three-dimensional waveguide structures and a process for the producti...
The fabrication of three-dimensional microstructure elements by electron-beam lithography and dry et...
Since the beginning of micro-optics fabrication most of the used technologies have been adapted from...
This thesis treats design, manufacture, evaluation and applications of computer-generated surface re...
We have developed different approaches for optical beam deflection on the base of transmittive micro...
This thesis treats design, manufacture, evaluation and applications of computer-generated surface re...
Beam shaping - the ability to engineer the phase and the amplitude of massive and massless particles...
Beam shaping—the ability to engineer the phase and the amplitude of massive and massless particles—h...
Recent research revealed that using the effective medium approach to generate arbitrary multi-phase ...
This thesis describes several techniques for the optimization of the manufacturing of relief diffrac...