Add to ORKGThin film integrated optics components such as light guides, modulators, directional couplers, and polar-izers demand high quality edge smoothness and high resolution pattern formation in dimensions down to submicrometer size. Fabrication techniques combining holographic and scanning electron beam lithogra-phy with ion beam micromachining have produced planar phase gratings with intervals as small as 2800 A, guiding channel couplers in GaAs, and also wire- grid polarizers for 10.6-,um radiation
We produce very smooth vertical sidewalls with high anisotropy in III-V semiconductors by ion beam e...
Focused ion beam (FIB) micromachining has been used to produce inclined planes on semiconductor surf...
Abstract: Integration of micro-optical elements (MOEs) with optical fiber at top-end was realized by...
Thin film integrated optics components such as light guides, modulators, directional couplers, and p...
We produce very smooth vertical sidewalls with high anisotropy in III-V semiconductors by ion beam e...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
Submicron minimum feature sizes are required for integrated optical and microoptical components. Ele...
10.1117/12.280533Proceedings of SPIE - The International Society for Optical Engineering3183128-137P...
Integration of micro-optical elements presents numerous challenges to the optical engineer in both f...
A proof-of-principle ion projection lithography (IPL) system called Maskless Micro-ion beam Reductio...
Integration of micro-optical elements presents numerous challenges to the optical engineer in both f...
The purpose that directs the broad field of lithographic fabrication is to provide reliable methods ...
This paper presents techniques for fabricating microscopic, nonplanar features in a variety of mater...
We produce very smooth vertical sidewalls with high anisotropy in III-V semiconductors by ion beam e...
Focused ion beam (FIB) micromachining has been used to produce inclined planes on semiconductor surf...
Abstract: Integration of micro-optical elements (MOEs) with optical fiber at top-end was realized by...
Thin film integrated optics components such as light guides, modulators, directional couplers, and p...
We produce very smooth vertical sidewalls with high anisotropy in III-V semiconductors by ion beam e...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
1-D, 2-D, 3-D microstructures with lateral dimensions at the scale of the wavelength of light can be...
Submicron minimum feature sizes are required for integrated optical and microoptical components. Ele...
10.1117/12.280533Proceedings of SPIE - The International Society for Optical Engineering3183128-137P...
Integration of micro-optical elements presents numerous challenges to the optical engineer in both f...
A proof-of-principle ion projection lithography (IPL) system called Maskless Micro-ion beam Reductio...
Integration of micro-optical elements presents numerous challenges to the optical engineer in both f...
The purpose that directs the broad field of lithographic fabrication is to provide reliable methods ...
This paper presents techniques for fabricating microscopic, nonplanar features in a variety of mater...
We produce very smooth vertical sidewalls with high anisotropy in III-V semiconductors by ion beam e...
Focused ion beam (FIB) micromachining has been used to produce inclined planes on semiconductor surf...
Abstract: Integration of micro-optical elements (MOEs) with optical fiber at top-end was realized by...