Microanalytical Imaging with Auger Electrons

The detection of Auger electrons in a scanning electron microscope in order to form chemically specific images of the surfaces of solids is reviewed. The limits to sensitivity and spatial resolution are described and the current "state of the art" is summarised. Some of the useful image processing tools are reviewed and then a small set of applications of the technique when used for the study of surface segregation, semiconducting devices and archaelogy are described