Add to ORKG151 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1975.U of I OnlyRestricted to the U of I community idenfinitely during batch ingest of legacy ETD
The technological importance of thin films of such materials as amorphous silicon and amorphous carb...
The identification, content, and role of impurities in a-Si thin films are sources of speculation no...
[[abstract]]The electrical and optical properties of a-Si depend greatly on the fill gas and substra...
Consiglio Nazionale delle Ricerche - Biblioteca Centrale - P.le Aldo Moro, 7 Rome / CNR - Consiglio ...
Pure a-Si films were prepared by rf-bias sputtering with magnetron target. The substrate was ion-bom...
Low temperature preparation of thin amorphous Silicon Nitride and Germanium Films by direct RF sputt...
The present paper deals with the investigation of Argon ions – substrate interactions during film g...
Research on the fabrication of efficient amorphous silicon solar cells is reported. Work on the depo...
A brief account of the several methods used for the production of thin films is presented in this C...
Structural and electrical properties of solid phase crystallized amorphous silicon thin fi...
The influence of various deposition parameters on the properties of amorphous silicon (a-Si) thin fi...
The crystallization of amorphous silicon thin films by electron beam exposure was studied. Amorphous...
Consiglio Nazionale delle Ricerche - Biblioteca Centrale - P.le Aldo Moro, 7, Rome / CNR - Consiglio...
We present an experimentally guided study of film layer structure and opto-electronic properties of ...
363 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1978.U of I OnlyRestricted to the ...
The technological importance of thin films of such materials as amorphous silicon and amorphous carb...
The identification, content, and role of impurities in a-Si thin films are sources of speculation no...
[[abstract]]The electrical and optical properties of a-Si depend greatly on the fill gas and substra...
Consiglio Nazionale delle Ricerche - Biblioteca Centrale - P.le Aldo Moro, 7 Rome / CNR - Consiglio ...
Pure a-Si films were prepared by rf-bias sputtering with magnetron target. The substrate was ion-bom...
Low temperature preparation of thin amorphous Silicon Nitride and Germanium Films by direct RF sputt...
The present paper deals with the investigation of Argon ions – substrate interactions during film g...
Research on the fabrication of efficient amorphous silicon solar cells is reported. Work on the depo...
A brief account of the several methods used for the production of thin films is presented in this C...
Structural and electrical properties of solid phase crystallized amorphous silicon thin fi...
The influence of various deposition parameters on the properties of amorphous silicon (a-Si) thin fi...
The crystallization of amorphous silicon thin films by electron beam exposure was studied. Amorphous...
Consiglio Nazionale delle Ricerche - Biblioteca Centrale - P.le Aldo Moro, 7, Rome / CNR - Consiglio...
We present an experimentally guided study of film layer structure and opto-electronic properties of ...
363 p.Thesis (Ph.D.)--University of Illinois at Urbana-Champaign, 1978.U of I OnlyRestricted to the ...
The technological importance of thin films of such materials as amorphous silicon and amorphous carb...
The identification, content, and role of impurities in a-Si thin films are sources of speculation no...
[[abstract]]The electrical and optical properties of a-Si depend greatly on the fill gas and substra...