INTERFACE ELECTRONIC STATES AND DIFFUSION OF METAL/OXIDE JUNCTION DEPOSITED BY MAGNETRON SPUTTERING

Low-emissivity glasses with laminated metal and dielectric layers are required for precise control of transmittance and reflectivity from the visible light to the infrared region. To enhance the performance, it is important to control film thickness of each layer and interface structure. However, due to thermal instability, dewettability, and oxidation of metal layers, the optical functionalities of such multi-layers often degrade. In this work, we investigated the thermal stability and electronic states of interfaces between silver (Ag) and zinc oxide (ZnO) as a model junction. Diffusion and oxidation process of Ag was clarified by post-deposition annealing