Dataset for Back-end-of-line a-SiOxCy:H dielectrics for resistive memory
- Fan, Junqing
- Kapur, Omesh
- Huang, Ruomeng
- King, Sean W.
- De Groot, Cornelis
- Jiang, Liudi
DOI Publisher
University of SouthamptonAbstract
Dataset of figures in the paper Fan, J., Kapur, O., Huang, R., De Groot, C., & Jiang, L. (2018). Back-end-of-line a-SiOxCy:H dielectrics for resistive memory. AIP Advances. This dataset including XPS on a-SiOxCy:H films and current-voltage measurements tests on W/a-SiOxCy:H/Cu resistive memories.</span
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