Compositional and structural studies of ion-beam modified AlN/TiN multilayers
- Amati, M
- Gregoratti, L
- Sezen, H
- Grce, A
- Milosavljevic, M
- Homewood, KP
Publication date
April 2017
DOI Publisher
Elsevier BV ISSN
0169-4332 Journal
Applied Surface Science Language
EnglishAbstract
This work was supported the Serbian Ministry of Education, Science and Technological Development (project ON 171023), ERC Advanced Investigator grant (226470 SILAMPS), and the International Atomic Energy Agency, Vienna (CRP 12024). We thank Petro Parisse and Loredana Casalis of the NanoInnovation Laboratory of Elettra – Sincrotrone Trieste SCpA for the AFM measurements
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