Micro-Electro-Mechanical Systems

Micro-electro-mechanical systems (MEMS) or Microsystems technology (MST) is a fascinating and exciting field which significantly contributes to build a bridge between science and society. Physical properties and material characteristics are translated into structures and devices that can have a large positive impact on people’s lives. Silicon micromachining is largely responsible for the expansion of sensors and actuators into more complex systems and into areas not traditionally related to microelectronics, such as medicine, biology and transportation. The shift to 3D microstructures has not only added a physical third dimension to silicon planar technology, but it also added a third dimension in terms of functionality and applications