An Inventive Framework of Micro-Electromechanical System (MEMS)

MEMS is an enabling technology allowing the development of smart products, enhancing the computational ability of microelectronics with the perception and control capabilities of micro sensors and micro actuators and expanding the space of possible designs and applications. MEMS is a relatively new technology which exploits the existing microelectronics infrastructure to create complex machines with micron feature sizes. MEMS promises to revolutionize nearly every product category by bringing together silicon based microelectronics with micro machining technology, making possible the realization of compl ete systems on a chip. Microelectromechanical systems (MEMS) technolog enable us to create various useful sensing and actuating devices integrated with other microelectronic, optoelectronic, microwave, thermal and mechanical devices for advanced Microsystem s. Micromachining and micro electro mechanical systems (MEMS) technologies can be used to produce complex structure, devices, and systems on the scale of micrometers. MEMS products based on piezoelectric and capacitance sensing now include pressure and flo w sensors, accelerometers, gyroscopes, microphones, digital light projectors, oscillators, and RF switches. MEMS devices are used in virtually all areas of industrial activity, health care, consumer products, construction, and milita ry and space hardware. The future of MEMS is multifaceted, complex, and subject to change, in response to the prevailing winds of investment by government and commercial entities. This diversification of product offerings and globalization of the industry has been accompanied by strong revenue growth and growing private investment. Much of the growth in MEMS business is expected to come from products that are in early stages of development or yet to be invented