Nonlinear oscillations in MEMS resonators

Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the resonator layout, different nonlinearities may be dominant in the resonator response. A model for a clamped-clamped beam resonator is derived, which contains both a mechanical and an electrical part. The dynamic behaviour of the resonator is investigated both numerically and experimentally in order to obtain a qualitative match