A combined semi-analytical and experimental approach for multiphysical nonlinear MEMS resonators

A combined semi-analytical and experimental approach is proposed for predictive modelling of the nonlinear dynamic behaviour of microelectromechanical resonators. The approach is demonstrated for a clamped-clamped beam resonator, for which the mechanical, electrical, and thermal domains are relevant. Multiphysics modelling is applied, based on first principles, to derive a reduced-order model of the resonator. A qualitative correspondence between numerical and experimental steady-state responses has been obtained. Depending on the excitation values, both simulations and experiments show hardening and softening nonlinear dynamic behaviour. Since the model captures the observed experimental behaviour, it can be used to optimize the resonator behaviour with respect to nonlinear dynamic effects