Growth of InSb on GaAs Substrates Using InAlSb Buffers for Magnetic Field Sensor Applications

We report the growth of InSb on GaAs using InAlSb buffers of high interest for magnetic field sensors. We have grown samples by metal-organic chemical vapor deposition consisting of {approx}0.55{micro}m thick InSb layers with resistive InAlSb buffers on GaAs substrates with measured electron mobilities of {approx}40,000 cm{sup 2}/V.s. We have investigated the In{sub 1-x}Al{sub x}Sb buffers for compositions x {le} 0.22 and have found that the best results are obtained near x = 0.12 due to the tradeoff of buffer layer bandgap and lattice mismatch