Microcooling : study on the application of micromechanical techniques

A review with 20 refs. Small scale low temp. electronic applications would largely benefit from the development of a closed-cycle microcooler, with a cooling power in the milliwatt range. In this article first the requirements for microcooling of LT electronics are considered. A review is presented of micromech. technologies and their possible application in a microcooler. Conventional cooling cycles are briefly reviewed on their suitability for miniaturization, and as an illustration, some first ideas on a miniature regenerative and a miniature recuperative cooling cycle are presented. [on SciFinder (R)