Demonstrator for nano-precision multi-agent MagLev positioning platform for high throughput metrology

High throughput qualification of semiconductor devices is needed to improve cost efficiency. This paper describes a nano-precision capable, multi-agent, flexible positioning platform, which can be used to increase (metrology) throughput in semiconductor industry by parallelization of measurements. It is based on magnetic levitation and control in 6-DoF, combining large x- and y-motions with sub-nanometer scanning resolution in a single stage. The system architecture of this flexible positioning platform has the ability to operate many devices in parallel. Each device can function as a lab-on-instrument to perform various tasks at the nano-scale, e.g. metrology, inspection, deposition, transport, cleaning, etc. A demonstrator setup was successfully designed, built and tested. With coarse positioning sensors a position resolution at sub-micrometer level is achieved, while the maximum acceleration and speed are above 10m/s 2 and 1 m/s respectively. Future testing includes integration of sub-nanometer-precision sensors and local control optimization to demonstrate sub-nanometer scanning performance.