An introduction to the development of modern coatings in micro system techniques will be presented. Supported by the tool, engineers will be able to control morphology and stress of layer substrate systems in such a way that modern micro systems will be matched precisely to the required usage
Die technische Oberfläche kann allgemein als die Grenzfläche eines Erzeugnisses zu seiner Umwelt def...
This work pursues a new approach for the modeling of micro mechanics in systems of the micro system ...
The Fraunhofer IPA concerns itself with the process simulation in the surface engineering. With some...
Because of its broad spectrum of fields of application, microsystem technology has become a key tech...
Because of its broad spectrum of fields of application, microsystem technology has become a key tech...
The technical surface can generally be defined as the interface of a product and its environment. Th...
In the given coating chamber is a system of rotating holders, which holds rotating tools. The chambe...
The coating film topography depends on the substrate structure, the application parameters and the c...
In this paper the current state of numerical simulation techniques in industrial coating technology,...
Microsystems may be characterized as multi-domain systems. Today, they usually comprise two or three...
In der Mikrosystemtechnik werden modernste Technologien (Mikroelektronik, Mikromechanik, ...) einges...
Die Mikrosystemtechnik (MST), also die Zusammenführung elektronischer und nichtelektronischer Teilsy...
This article presents a simulation tool for developing and characterizing microelectromechanical sys...
Microsystem technology is a highly interdisciplinary area. Therefore, a combination of different CAD...
A new simulation model is presented that incorporates all the relevant processes for structure forma...
Die technische Oberfläche kann allgemein als die Grenzfläche eines Erzeugnisses zu seiner Umwelt def...
This work pursues a new approach for the modeling of micro mechanics in systems of the micro system ...
The Fraunhofer IPA concerns itself with the process simulation in the surface engineering. With some...
Because of its broad spectrum of fields of application, microsystem technology has become a key tech...
Because of its broad spectrum of fields of application, microsystem technology has become a key tech...
The technical surface can generally be defined as the interface of a product and its environment. Th...
In the given coating chamber is a system of rotating holders, which holds rotating tools. The chambe...
The coating film topography depends on the substrate structure, the application parameters and the c...
In this paper the current state of numerical simulation techniques in industrial coating technology,...
Microsystems may be characterized as multi-domain systems. Today, they usually comprise two or three...
In der Mikrosystemtechnik werden modernste Technologien (Mikroelektronik, Mikromechanik, ...) einges...
Die Mikrosystemtechnik (MST), also die Zusammenführung elektronischer und nichtelektronischer Teilsy...
This article presents a simulation tool for developing and characterizing microelectromechanical sys...
Microsystem technology is a highly interdisciplinary area. Therefore, a combination of different CAD...
A new simulation model is presented that incorporates all the relevant processes for structure forma...
Die technische Oberfläche kann allgemein als die Grenzfläche eines Erzeugnisses zu seiner Umwelt def...
This work pursues a new approach for the modeling of micro mechanics in systems of the micro system ...
The Fraunhofer IPA concerns itself with the process simulation in the surface engineering. With some...