The effect of temperature, water content, and the type of reagent on the silylation of fused silica capillaries was studied by 29Si and 13C CP-MAS NMR. Fumed silica (Cab-O-Sil M5), which is essentially a highly dispersed vitreous quartz with a surface comparable to that of fused silica capillary columns, was selected as a model material. Hexamethyldisilazane (HMDS) and 1,2-diphenyl-1,1,3,3-tetraphenyldisilazane (DPTMDS), which were used as silylation reagents, yielded trimethyl- and dimethylphenylsilyl surface groups respectively at lower temperatures (<350°C an