Deactivation of fused-silica capillary columns and vitreous silica surfaces with polymethylhydrosiloxanes (PMHS) at temperatures between 240 and 360°C was investigated by gas chromatography (GC) and solid-state 29Si NMR spectroscopy. The influence of temperature, amount of water at the surface and film thickness on the stability and nature of the polymer deactivation layer was studied by solid-state 29Si NMR of the model substrate Cab-O-Sil, a fumed silica. These NMR measurements match the GC results and offer additional information relating to the nature of the deactivating layer at surfaces silylated under various reaction conditions. Differences in the nature and structure of the deactivating film occur when the silica surface is coated ...