A study of channeling patterns from strained Si1-xGex/Si bilayers close to (011) axes

This paper characterises the angular intensity distribution of MeV protons transmitted through strained Si1-xGex/Si bilayers close to the axis. The ring-like intensity distribution produced by the front layer axis when it is aligned close to the beam direction is projected either towards or away from the rotated back layer axis. The resultant transmitted angular intensity distribution depends on both the bilayer tilt angle and the interface rotation angle. Previously unobserved intensity distributions through such structures are simulated using a Monte Carlo channeling code, and similar behaviour is also observed in channeling patterns recorded from thinned, strained Si1-xGex/Si bilayers.