Thermal Properties Of Metallic Films

As the feature size of electronic devices continues to decrease, thermal properties become a more important consideration. In this chapter, theoretical and experimental considerations related to the thermal properties of metallic films and wires are presented. It is shown that many features can be understood using the Wiedemann-Franz law and standard models for surface and grain-boundary electron scattering. More sophisticated models including solutions to the Boltzmann transport equation are also described. Finally, contributions to thermal conductivity due to phonons are shown to make only a small contribution. © 2014 Woodhead Publishing Limited. All rights reserved