The attachment of biomolecules on III-V semiconductor materials has received attention because of their versatile applications. We described the detailed characterization of alkanethiol and cysteine-terminated peptide layers using two different methods on InP surfaces: (1) immobilization using solution based molecules and (2) patterning which directly transfers molecules using microcontact printing and Dip-Pen Nanolithography (DPN). We evaluated the surfaces using several surface techniques; contact angle measurements, atomic force microscopy (AFM), X-ray photoelectron spectroscopy (XPS), and ellipsometry were performed. The surface characterization techniques for solution based immobilization showed that the composition of the mixed monoly...