International audienceWet chemical processes were investigated to remove alkanethiol self-assembled monolayers (SAMs) and regenerate GaAs (001) samples studied in the context of the development of reus-able devices for biosensing applications. The authors focused on 16-mercaptohexadecanoic acid (MHDA) SAMs that are commonly used to produce an interface between antibodies or others proteins and metallic or semiconductor substrates. As determined by Fourier transform infrared absorption spectroscopy, among the investigated solutions of HCl, H 2 O 2 ,and NH 4 OH, the highest efficiency in removing alkanethiol SAM from GaAs was shown by NH 4 OH:H 2 O 2 (3:1 volume ratio) diluted in H 2 O. The authors observed that this result was related to che...