A new compact model of squeeze-film damping is developed based on the numerical solution of the Boltzmann kinetic equation. It provides a simple expression for the damping coefficient and the quality factor valid through the slip, transitional and free-molecular regimes. In this work, we have applied statistical analysis to the current model using the chi-squared test. The damping predictions are compared with both Reynolds equation-based models and experimental data. At high Knudsen numbers, the structural damping dominates the gas squeeze-film damping. When the structural damping is subtracted from the measured total damping force, good agreement is found between the model predictions and the experimental data
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)Interna...
This paper provides experimental validation of the predictions by two recent models for squeezed fil...
We introduce an analytical model for the gas damping of a MEMS resonator in the regime of free molec...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
The reliable estimation of squeeze-film damping (SQFD) is a prerequisite for the design of many micr...
We propose a mixed−level simulation scheme for squeeze film damping effects in microdevices, which m...
International audienceCorrect modelling of damping is essentiel to capture the dynamic behaviour of ...
Correct modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our int...
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap s...
We consider squeeze film gas damping during microbeam motion away and toward a substrate as occurs d...
Predicting the gas damping of microcantilevers oscillating in different vibration modes in unbounded...
The Reynolds equation coupled with an effective viscosity model is often employed to predict squeeze...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping result...
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)Interna...
This paper provides experimental validation of the predictions by two recent models for squeezed fil...
We introduce an analytical model for the gas damping of a MEMS resonator in the regime of free molec...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
An improved theoretical approach is proposed to predict the dynamic behavior of long, slender and fl...
The reliable estimation of squeeze-film damping (SQFD) is a prerequisite for the design of many micr...
We propose a mixed−level simulation scheme for squeeze film damping effects in microdevices, which m...
International audienceCorrect modelling of damping is essentiel to capture the dynamic behaviour of ...
Correct modelling of damping is essential to capture the dynamic behaviour of a MEMS device. Our int...
Two squeeze-film gas damping models are proposed to quantify uncertainties associated with the gap s...
We consider squeeze film gas damping during microbeam motion away and toward a substrate as occurs d...
Predicting the gas damping of microcantilevers oscillating in different vibration modes in unbounded...
The Reynolds equation coupled with an effective viscosity model is often employed to predict squeeze...
Many MEMS devices employ parallel plates for capacitive sensing and actuation. The desire to get a s...
In a variety of MEMS applications, the thin film of fluid responsible of squeeze-film damping result...
Submitted on behalf of EDA Publishing Association (http://irevues.inist.fr/handle/2042/16838)Interna...
This paper provides experimental validation of the predictions by two recent models for squeezed fil...
We introduce an analytical model for the gas damping of a MEMS resonator in the regime of free molec...