A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects

International audienceCorrect modelling of damping is essentiel to capture the dynamic behaviour of a NEMS device. Our interest is squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface. The lateral dimensions of the surfaces are large compared to the gap and the system is considered isothermal. Squeeze film damping is then governed by the Reynolds equation